Below are the photos and some other information on the test DLL designed for Micron's Double Data Rate DRAM. The DLL uses a symmetrical delay line for tight locking on both the rising and falling edges. The design shown here worked beyond 250MHz (500 Mbits/s for DDR DRAM since we clock data in on both the rising and falling edges). This design was tested during April of 1998.

Photo of the phase detector implemented in a 0.25 um process. This test section was implemented in the scribe of a development wafer.
http://cmosedu.com/jbaker/projects/dllpd.jpg

Below is a zoomed out view showing the phase detector, delay element and control logic. The test circuit contained 48 delay elements and measured 95um high and 1775 um long.

http://cmosedu.com/jbaker/projects/dlls98.jpg

Input (bottom) and output of the DLL at 200 MHz are shown below (2ns/div). Note how the input looks sinusoidal. We used a femto probe to make the input/output measurements where the input was applied through a standard microprobe from a twin lead clip (not a good high frequency connection!) through a BNC tee where the other end of the cable was terminated using the 50 ohm input of an o-scope (and used for a solid scope trigger). A computer program we had for the scope we were using said that one sigma for a jitter measurement was 79 ps while the range of jitter over 7,000 sweeps was under +/- 200 ps.

http://cmosedu.com/jbaker/projects/trace.jpg

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