What does "feature size" mean? If the process is a "45-nm process" what

does this mean?

 

Feature size is generally defined as half the distance between like

points in an array of minimum width and minimum spaced metal1 (see Fig.

16.19 for example).

 

In older processes "2 micron CMOS" meant that the minimum gate length

was 2 microns.

 

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