What
does "feature size"
mean? If the process is a "45-nm process" what
does
this mean?
Feature
size is generally defined as
half the distance between like
points
in an array of minimum width and
minimum spaced metal1 (see Fig.
16.19
for example).
In
older processes "2 micron
CMOS" meant that the minimum gate length
was 2
microns.